-Program-

12月11日(火)
Time Title 
Speaker  
11:30 Start accepting  
12:30 Opening  
13:00-13:10                                 Chairperson: Hiroshi Kawata(KEK)
13:00-13:10 Opening address Sunao Ishihara (The Univ. of Tokyo)
13:00-13:10                           Chairperson: Masakazu Washio(Waseda Univ.)
13:10-13:50 -Invited-
”Aiming at the massproduction by EUVL ~From the beginning to the future prospect~”


Hiroo Kinoshita (Univ. of Hyogo)
13:50-14:30 -Invited-
"Development of "Compact ERL (cERL)" accellerator based on Superconducting cavity technology and its application by using cERL"

Hiroshi Sakai (KEK)
- Coffee break 【14:30-15:00】 -
15:00-16:00                               Chairperson:Satoshi Tanaka(EIDEC)
15:00-15:30 "Status Updates for High Power LPP-EUV Source
with Long Collector Mirror Lifetime"

Hakaru Mizoguchi (Gigaphoton Inc. )
15:30-16:00 "FEL irradiation tolerance of multilayer optical system"
Satoshi Ichimaru (NTT-AT)
Masatoshi Hatayama (NTT-AT)
16:00-17:05                              Chairperson:Hiroshi Kawata(KEK)
16:00-16:30 "Consumer Applications of Superconducting Technology and Future Prospects "
Katsuya Sennyu (Mitsubishi Heavy Industries Machinery Systems, Ltd.)
16:30-17:00 "Present Status and Future Prospects of EUV Lithography"
Hidemi Ishiuchi (EIDEC)
17:00 Closing